Instrument Archive - Australian National Fabrication Facility

3D optical profiler

Make and Model: Veeco Wyko NT1100 Campus:
Contact: Dr Wael Al Abdulla

Agilent CARY 630 FTIR spectrometer

Make and Model: Agilent CARY 630 FTIR spectrometer Campus: St Lucia
Contact: Dr Javaid Khan

Aqueous gel permeation chromatography system (aqueous GPC)

Make and Model: Agilent Technologies Aqueous GPC 1260 Infinity system Campus: St Lucia
Contact: Dr Javaid Khan

AR-G2 rheometer

Make and Model: AR-G2 rheometer Campus: St Lucia
Contact:

Asylum Research Cypher AFM

Make and Model: Asylum Research Cypher AFM Campus: St Lucia
Contact:

Asylum Research MFP-3D-BIO AFM

Make and Model: Asylum Research MFP-3D- BIO AFM Campus: St Lucia
Contact:

Atomic force microscopy suite

Make and Model: Atomic force microscopy (AFM) suite Campus: St Lucia
Contact:

Bruker Dimension XR

Make and Model: Bruker Dimension Icon XR Campus:
Contact:

CAD PC 1

Make and Model: CAD Computing Campus: St Lucia
Contact: Dr Juan Jane Li

CAD PC 2

Make and Model: CAD Computing Campus: St Lucia
Contact: Dr Juan Jane Li

CAD PC 3

Make and Model: CAD Computing Campus: St Lucia
Contact: Dr Juan Jane Li

Computer-aided design (CAD) software

Make and Model: CAD Computing Campus: St Lucia
Contact: Dr Juan Jane Li

Deep reactive ion etcher (DRIE)

Make and Model: Plasma-Therm Versaline DRIE system Campus: St Lucia
Contact: Mr Kai Yu Liu

Dektak 150 stylus profiler

Make and Model: Dektak 150 Campus: St Lucia
Contact: Dr Wael Al Abdulla

DektakXT stylus profiler

Make and Model: DektakXT Campus: St Lucia
Contact:

Device testing glove box

Make and Model: COPE Cleanroom Campus: St Lucia
Contact:

Dicing saw

Make and Model: ADT 7100 precision dicing saw Campus: St Lucia
Contact: Dr Wael Al Abdulla

Differential scanning calorimetry (DSC)

Make and Model: METTLER TOLEDO DSC 1 STARe System Campus: St Lucia
Contact: Dr Javaid Khan

Direct write laser system for chrome mask production

Make and Model: Heidelberg µPG101 Campus: St Lucia
Contact: Dr Juan Jane Li

Dispersive Raman microscope

Make and Model: Dispersive Raman microscope Campus: St Lucia
Contact: Dr Wael Al Abdulla

Dynamic mechanical analysis (DMA)

Make and Model: Mettler Toledo DMA Campus: St Lucia
Contact: Dr Javaid Khan

Electron beam evaporation system

Make and Model: Temescal FC-2000 Campus: St Lucia
Contact: Mr Kai Yu Liu

Encapsulation glove Box

Make and Model: MBRAUN glove box system Campus: St Lucia
Contact:

Form 3 (LFS) 3D printer

Make and Model: Form 3 Campus: St Lucia
Contact:

Four point probe

Make and Model: Keithlink four point probe Campus: St Lucia
Contact:

Gel permeation chromatography system (GPC)

Make and Model: Waters GPC: 1515 Isocratice HPLC Pump, 717plus Autosampler, 2414 Refractive Index Detector, 2489 UV/Visible Detector Campus: St Lucia
Contact: Dr Javaid Khan

Glove box 1

Make and Model: MBRAUN MB200 glove box systems Campus: St Lucia
Contact: Dr Javaid Khan

Glove box 2

Make and Model: MBRAUN MB200 glove box systems Campus: St Lucia
Contact: Dr Javaid Khan

Glove box with integrated vacuum evaporators

Make and Model: MBRAUN glove box system Campus: St Lucia
Contact:

Hexamethyldisilizane (HMDS) oven

Make and Model: HMDS oven Campus: St Lucia
Contact: Mr Kai Yu Liu

Hot Embosser

Make and Model: EVG520IS Campus: St Lucia
Contact:

JEOL desktop sputterer

Make and Model: JEOL desktop sputterer Campus: St Lucia
Contact: Dr Wael Al Abdulla

JEOL IT-300 scanning electron microscope (SEM)

Make and Model: Jeol IT-300 SEM Campus: St Lucia
Contact: Dr Wael Al Abdulla

Jeol NeoScope scanning electron microscope (SEM)

Make and Model: Jeol IT-300 SEM Campus: St Lucia
Contact: Mr Kai Yu Liu

KLA P-7 Stylus Profiler

Make and Model: KLA P-7 Campus:
Contact: Dr Wael Al Abdulla

Laser light scattering spectrometry system

Make and Model: Surfscan 7700M Campus: Nathan
Contact:

Leica microscope

Make and Model: Leica DM2000 Campus: St Lucia
Contact: Mr Kai Yu Liu

Leica SP8 confocal laser scanning microscope (LSM)

Make and Model: Leica SP8 Campus: St Lucia
Contact:

Liquid chromatography mass spectrometry (LC-MS)

Make and Model: Waters LC-MS: Alliance 2695 Separations Module and Micromass Quattro micro API Campus: St Lucia
Contact: Dr Javaid Khan

Litesizer 500

Make and Model: Litesizer 500 Campus:
Contact: Dr Javaid Khan

Lithography suite

Make and Model: Lithography suite Campus: Nathan
Contact:

Mask Aligner EVG620

Make and Model: Mask Aligner EVG620 Campus: St Lucia
Contact:

Mask Aligner NXQ

Make and Model: Mask Aligner NXQ Campus: Long Pocket
Contact:

Microfluidics

Make and Model: Microfluidics Campus: St Lucia
Contact:

Nanoscribe

Make and Model: Nanoscribe Photonic Professional GT Campus: St Lucia
Contact: Dr Juan Jane Li

NanoWizard® 4 XP BioScience atomic force microscope (BioAFM)

Make and Model: NanoWizard® 4 XP BioScience atomic force microscope (BioAFM) Campus: St Lucia
Contact: Dr Yun Huang

Nicolet 5700 ATR-FTIR spectrometer

Make and Model: Nicolet 5700 ATR-FTIR spectrometer Campus: St Lucia
Contact: Dr Javaid Khan

Nicolet 5700 NIR-FTIR

Make and Model: Nicolet 5700 NIR-FTIR Campus: St Lucia
Contact: Dr Javaid Khan

Nicolet NXR FT-Raman

Make and Model: Nicolet NXR FT-Raman Campus: St Lucia
Contact: Dr Javaid Khan

Nikon Eclipse Ti-U inverted microscope

Make and Model: Nikon Eclipse Ti-U inverted microscope Campus: St Lucia
Contact:

OCA 20

Make and Model: OCA 20 Campus: St Lucia
Contact:

Olympus LEXT OLS4100 laser scanning digital microscope

Make and Model: Olympus LEXT OLS4100 laser scanning digital microscope Campus: St Lucia
Contact:

Oxford reactive ion etcher

Make and Model: Oxford PlasmaPro NGP80 RIE Campus: St Lucia
Contact: Mr Kai Yu Liu

Oxidation Furnace

Make and Model: HiTech benchtop oxidation furnace Campus: Long Pocket
Contact: Mr Kai Yu Liu

Oxygen plasma cleaner

Make and Model: Harrick Plasma expanded plasma cleaner (PDC-001 and PDC-002) Campus: St Lucia
Contact:

Photolithography – AZ stream

Make and Model: Photolithography - AZ stream Campus: St Lucia
Contact: Dr Juan Jane Li

Photolithography – Dry film stream

Make and Model: Photolithography - Dry film stream Campus: St Lucia
Contact:

Photolithography – Novel stream

Make and Model: Photolithography - Novel stream Campus:
Contact: Dr Juan Jane Li

Photolithography – SU8 stream

Make and Model: Photolithography - SU8 stream Campus: Long Pocket
Contact:

Plasma etching equipment

Make and Model: LAM AutoEtch 480 Campus: Nathan
Contact: Mr Glenn Walker 2

Prog 200 reactive ion etcher

Make and Model: Prog 200 RIE Campus: Long Pocket
Contact: Mr Kai Yu Liu

RC2 Spectroscopic Ellipsometer

Make and Model: JA Woollam Campus: St Lucia
Contact: Dr Wael Al Abdulla

Reactive ion etching (RIE)

Make and Model: RIE Campus: St Lucia
Contact: Mr Kai Yu Liu

Renishaw inVia Raman

Make and Model: Renishaw inVia Raman Campus: Nathan
Contact:

SCI FilmTek 2000M

Make and Model: SCI FilmTek 2000M Campus: St Lucia
Contact: Mr Kai Yu Liu

Semiautomatic probe station

Make and Model: Semiprobe SA-6 Campus: St Lucia
Contact:

Semiconductor device analyser

Make and Model: Agilent B1500A Campus: St Lucia
Contact:

SiC deposition on Si wafers

Make and Model: The EpiFlx reactor Campus: Nathan
Contact: Mr Glenn Walker 2

Silanisation dessicator

Make and Model: Silanisation bell jar dessicator from ProSciTech Campus: St Lucia
Contact:

Silanisation dessicator

Make and Model: Silanisation bell jar dessicator from ProSciTech Campus: Long Pocket
Contact:

Soft Lithography – Long Pocket

Make and Model: Soft Lithography - Long Pocket Campus: Long Pocket
Contact:

Solar Cell QE/IPCE/I-V measure

Make and Model: Solar cell I-V measurement Campus: St Lucia
Contact:

Solvent purification system (SPS)

Make and Model: Solvent purification system (SPS) Campus: St Lucia
Contact: Dr Javaid Khan

Spin Coater – PDMS

Make and Model: APT Polos spin coater Campus: Long Pocket
Contact:

Spin Coater – SU8

Make and Model: Brewer Science CEE 200X spin coater Campus:
Contact:

Sputtering system

Make and Model: AJA ATC 2200 system Campus: St Lucia
Contact: Mr Kai Yu Liu

SurPASS electrokinetic analyser for solid surface analysis

Make and Model: Anton Paar SurPASS electrokinetic analyser Campus: St Lucia
Contact: Dr Javaid Khan

Tergeo plasma cleaner

Make and Model: Tergeo Tabletop Plasma Cleaner Campus:
Contact:

Thermal analysis characterisation suite (DMA, DSC, TGA)

Make and Model: Thermal analysis characterisation suite (DMA, DSC, TGA) Campus: St Lucia
Contact: Dr Javaid Khan

Thermal evaporators – metal

Make and Model: Thermal evaporator – metal Campus: St Lucia
Contact:

Thermal evaporators – organic

Make and Model: Thermal evaporators – organic Campus: St Lucia
Contact:

Thermal gravimetric analysis (TGA)

Make and Model: METTLER TOLEDO TGA/DSC 1 STAR e System Campus: St Lucia
Contact: Dr Javaid Khan

Trotec laser engraver

Make and Model: Trotec laser engraver Speedy 360 Campus:
Contact:

Ultimaker 2 Extended+ 3D printer

Make and Model: Ultimaker 2 Extended+ Campus: St Lucia
Contact:

UV plate reader

Make and Model: Tecan Infinite 200 Campus: St Lucia
Contact: Dr Javaid Khan

UV-ozone cleaner

Make and Model: MBRAUN MB-UV-O3-Cleaner Campus: St Lucia
Contact:

Veeco Multimode Scanning Probe Microscope (AFM)

Make and Model: Veeco Multimode Nanoscope IVA SPM Campus: St Lucia
Contact:

Wire Bonder

Make and Model: TPT HB16 Wire Bonder Campus:
Contact: Mr Kai Yu Liu

WITec Raman AFM SNOM

Make and Model: WITec Raman AFM SNOM Campus: St Lucia
Contact:

XeF2 Etcher

Make and Model: SPTS XACTIX® e2 Series™ Campus: St Lucia
Contact: Mr Kai Yu Liu

Zeiss LSM 710 confocal laser scanning microscope

Make and Model: Zeiss LSM 710 Campus: St Lucia
Contact:

Zeiss Microscope

Make and Model: Zeiss Campus: Long Pocket
Contact: Mr Kai Yu Liu

Zeta 300 3D optical profiler

Make and Model: Zeta 300 Campus: St Lucia
Contact: Dr Wael Al Abdulla

Australian National Fabrication Facility

Queensland Node