Free Electron Beam Lithography Workshop

As part of the completion of the installation of UQ’s new Electron Beam Lithography system (EBL), Raith EBPG5150, the Centre for Microscopy and Microanalysis (CMM) has organised a workshop event from 1 to 5 pm on 2nd of October, 2018.

This workshop will be presented by various UQ researchers, and Nit Taksatorn from GenISys GmbH on advanced quantum devices, lithography materials, and computation lithography software packages.

If you are interested in seeing the cleanroom and instrumentation, CMM will be running tours during the break time at their newly refurbished facility in Hawken Engineering building. Please RSVP to  if you are interested in the tours.

Workshop Program: