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Australian National Fabrication Facility

Queensland Node

  • About Us
    • What We Do
    • People
    • Our Service
    • Locations
  • Access
    • Access and Training
    • Pricing
    • RIMS Booking System
  • Tools
    • Computer Aided Design (CAD)
    • Deposition
    • Etching
    • Lithography
    • Imaging & Surface Characterisation
    • Device Testing
    • Material Characterisation
    • Synthesis
    • Instrument list and contacts
  • Resources
    • News
    • Workshops and seminars
    • Publications
    • Publication policy
  • Support
    • ANFF-Q Student Award
    • Arrange a consultation
    • Grant applications
    • Funding for industry collaborations
    • Policies and forms
    • Resources
  • Contact
    • Feedback
  • Make a Booking
Tools
  • Computer-aided design (CAD)
    • CAD PC 1
    • CAD PC 2
    • CAD PC 3
    • CAD software
  • Deposition
    • Electron beam evaporation system
    • Electron beam evaporator, ATS500 HHV
    • Oxidation furnace
    • Dry oxidation furnace
    • LPCVD Furnace
    • SiC deposition on Si wafers
    • Inductively Coupled Plasma CVD
    • Sputtering system
    • Magnetron sputterer, SNS gamma
  • Device testing
    • Class AAA solar simulator
    • Four point probe
    • Semiautomatic probe station
    • Semiconductor device analyser
    • Solar cell QE/IPCE/IV measurement system
    • Wire bonder
  • Etching
    • Deep reactive ion etcher
    • Dicing saw
    • Plasma etching equipment
    • Reactive ion etching
      • Oxford reactive ion etcher
      • Prog 200 reactive ion etcher
    • Trotec laser engraver
    • Laser Micromachining System, Oxford Lasers, A series
    • XeF2 etcher
    • The PRIMAXX® uEtch Vapor HF Etching System
    • Wet Etching
  • Imaging & Surface Characterisation
    • Atomic force microscopy suite
      • Asylum Research MFP-3D AFM
      • AFM, Park System NX20
      • Bruker Dimension XR AFM
      • NanoWizard® 4 XP BioScience atomic force microscope (BioAFM)
      • Veeco Multimode Scanning Probe Microscope (AFM)
      • WITec Raman AFM SNOM
    • Confocal laser scanning microscopy suite
      • Leica SP8 confocal laser scanning microscope (LSM)
      • Zeiss LSM 710 confocal laser scanning microscope
    • KLA P-7 Stylus Profiler
    • JEOL IT-300 scanning electron microscope (SEM)
    • Jeol NeoScope scanning electron microscope (SEM)
    • Thermo Fisher Scientific Apreo 2S Scanning Electron Microscope (SEM)
    • Leica microscope
    • Nikon Eclipse Ti-U inverted microscope
    • SCI FilmTek 2000M
    • Ellipsometer, VUV-VASE GEN-II, JA Woollam
    • SurPASS electrokinetic analyser for solid surface analysis
    • Zeiss microscope
    • Zeta 300 3D optical profiler
    • Filmetrics F40-NSR Thin-Film Measurement System
    • Veeco Dektak 150 Stylus Profilometer
  • Lithography
    • 3D printing suite
      • Form 3 (LFS) 3D printer
      • Titan 2 (SLA & DLP) 3D printer
      • Ultimaker 2 Extended+ 3D printer
    • Direct write laser system for chrome mask production
    • HMDS oven
    • Hot embosser
    • Lithography suite
    • Microfluidics platform
    • Nanoscribe
    • Oxygen plasma cleaner
    • Tergeo plasma cleaner
    • Photolithography
      • AZ stream
      • SU8 stream
      • Dry film stream
      • Novel stream
    • Silanisation dessicators
    • Soft lithography
    • Spin coaters
    • UV–ozone cleaner
  • Material characterisation
    • Aqueous gel permeation chromatography system (GPC)
    • Gel permeation chromatography system (GPC)
    • Laser light scattering spectrometry system
    • Liquid chromatography mass spectrometry (LC-MS)
    • Litesizer 500
    • Thermal analysis characterisation suite (DMA, DSC, TGA)
      • Dynamic mechanical analysis
      • Differential scanning calorimetry
      • Thermal gravimetric analysis
    • UV plate reader
    • Vibrational spectroscopy suite (FTIR and Raman)
      • Agilent CARY 630 FTIR spectrometer
      • Nicolet 5700 ATR-FTIR spectrometer
      • Nicolet 5700 NIR-FTIR
      • Nicolet NXR FT-Raman
  • Synthesis
    • Device testing glove box
    • Encapsulation glove box
    • Glove box unit with solvent purification system
    • Glove box with integrated vacuum evaporators
    • Rapid Thermal Processing/Annealing System (RTP)
  • Instrument list and contacts

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