Pricing Policy

As part of Australia’s national research infrastructure, ANFF-Qld is committed to supporting leading-edge research and innovation by providing affordable access to advanced fabrication capabilities. Operating on a not-for-profit basis, we aim to maximise accessibility while maintaining high-quality service delivery.

Access charges are structured to reflect user categories:

  • Australian public sector researchers are charged at marginal cost rates to promote academic and publicly funded research.
  • Australian and international Industry users are charged at commercial rates, which support facility sustainability and reinvestment.

The new pricing model was introduced effective from 1 July 2025. It has been carefully developed in consultation with our governance and stakeholder groups. The model introduces Tier 1 and Tier 2 equipment classifications to establish a fairer and more transparent pricing structure based on equipment type, technical complexity, ongoing maintenance costs, and usage intensity.

New ANFF-Qld Pricing (Effective 1 July 2025)

User GroupTier 1 EquipmentTier 2 EquipmentStaff Support Rate
Host University (The University of Queensland and Griffith University)$40.00 ex gst$30.00 ex gst$75.00 ex gst
Other Australian Universities$40.00 ex gst$30.00 ex gst$75.00 ex gst
Australian Publicly Funded Research Agency (i.e. CSIRO)$40.00 ex gst$30.00 ex gst$75.00 ex gst
Australian and International Industry$85.00 ex gst$75.00 ex gst$150.00 ex gst
  • Project (Quoted Projects): An additional + 10% surcharge of project management and setup fee will be applied to the total quoted amount to be fully executed by ANFFQLD professional staff.
  • Other items that may incur a fee include : Consumables, Legal Fees, and GST if applicable. ANFFQLD Consumables are charged at actual cost plus 10% through the ANFFQLD Booking System.
Type of UsageDescription
Training – Equipment Operations and Process DevelopmentTraining is provided, covering both equipment usage and process development.
Independent Equipment OperationUser is trained and operates the equipment independently without staff support.
Staff-Supported Equipment UsageUser is trained but requires staff guidance and assistance for certain tasks.
Project-Based Quoted TasksANFF-Qld Staff fully manages and executes all operations and project activities on behalf of the customer.
  • ANFFQLD encourage all Host University users to complete equipment training so they may operate instruments independently, with staff-support assistance as needed.
  • ANFFQLD Staff-performed Quote jobs will not be accepted for Host University users (UQ and Griffith). However, some special projects with specific exceptions may be considered and are subject to approval by the ANFFQLD Manager.

Below is the list of available equipment along with their respective tier classifications.

ResourceResource GroupLocationTier
AJA RF/DC SputtererDepositionUQTier 1
ALD Picosun R-200 AdvancedDepositionUQTier 1
E-Beam EvaporatorDepositionUQTier 1
ACCRETECH SS20 Dicing SawEtchingUQTier 1
ADT 7100 Dicing SawEtchingUQTier 1
DRIEEtchingUQTier 1
HF VPE (dry etching)EtchingUQTier 1
KOH TankEtchingUQTier 1
Oxford ICP RIEEtchingUQTier 1
Oxford RIEEtchingUQTier 1
Tepla Microwave Ashing systemEtchingUQTier 1
XeF2 EtcherEtchingUQTier 1
SUSS Mask Aligner LithographyUQTier 1
Maskless Aligner MLA150LithographyUQTier 1
MPO100 Nano 3D PrinterLithographyUQTier 1
NanoscribeLithographyUQTier 1
EVG Hot EmbosserLithographyUQTier 1
Sawatec spin coaterLithographyUQTier 1
Bruker Dimension XR AFMImaging and Surface CharachterisationUQTier 1
Cypher AFMImaging and Surface CharachterisationUQTier 1
Jeol IT-300 SEMImaging and Surface CharachterisationUQTier 1
JPK Biological AFMImaging and Surface CharachterisationUQTier 1
Leica SP8 confocal LSMImaging and Surface CharachterisationUQTier 1
NIKON MicroscopeImaging and Surface CharachterisationUQTier 1
Olympus OLS5100 Confocal MicroscopeImaging and Surface CharachterisationUQTier 1
RC2 Spectroscopic EllipsometerImaging and Surface CharachterisationUQTier 1
Witec Raman AFMImaging and Surface CharachterisationUQTier 1
Zeiss 710 Confocal LSMImaging and Surface CharachterisationUQTier 1
COPE Evaporator 2 – AngstromDepositionUQTier 1
COPE_Chembox_AngstromDepositionUQTier 1
COPE_Evaporator 1 – AngstromDepositionUQTier 1
3C silicon carbide epitaxial furnace, SPT Micro EpiFlxDepositionGUTier 1
Furnace, Hitech LPCVDDepositionGUTier 1
ICPCVD – Oxford Instruments PlasmaPro 100 ICPCVDDepositionGUTier 1
Magnetron Sputterer SNS GammaDepositionGUTier 1
e-Beam evaporator HHV ATS500DepositionGUTier 1
ICP Plasma Etcher, STS MultiplexEtchingGUTier 1
HF Vapour Etcher, SPTS uEtchEtchingGUTier 1
Plasma Asher,  Gasonics L3510LithographyGUTier 1
Lithography SuiteLithographyGUTier 1
Furnace, Hitech OxidationMaterials synthesis and modificationGUTier 1
Ellipsometer, JA Woollam VUV-VASE EllipsometerImaging and Surface CharachterisationGUTier 1
AFM with 200mm mapping stage, Park Systems NX20Imaging and Surface CharachterisationGUTier 1
Agilent B1500A Semi Device AnalyzerDevice TestingUQTier 2
Agilent B1500A Semi Device Analyzer and Probe stationDevice TestingUQTier 2
Agilent B1500A Semi Device Analyzer and Probe stationDevice TestingUQTier 2
Encapsulation Glove BoxDevice TestingUQTier 2
Four-point probe – COPEDevice TestingUQTier 2
Solar Cell QE/IPCE/I-V measureDevice TestingUQTier 2
Wire Bonder – HB16Device TestingUQTier 2
Laser Cutter – Trotec Speedy 360EtchingUQTier 2
JEOL Desktop SputtererImaging and Surface CharachterisationUQTier 2
KLA P7 – Stylus ProfilerImaging and Surface CharachterisationUQTier 2
Olympus DSX1000 Digital MicroscopeImaging and Surface CharachterisationUQTier 2
SurPASSImaging and Surface CharachterisationUQTier 2
Zeiss Microscope – Long PocketImaging and Surface CharachterisationUQTier 2
Zeta 300 Optical profiler/Film thickness systemImaging and Surface CharachterisationUQTier 2
3D Printer – Ultimaker 2LithographyUQTier 2
COPE – UV / Ozone CleanerLithographyUQTier 2
Fumehood – corrosivesLithographyUQTier 2
Fumehood – flammablesLithographyUQTier 2
HMDS OvenLithographyUQTier 2
Oxygen plasma cleaner – Long PocketLithographyUQTier 2
PC CAD1 Solidworks (L-Edit)Lithography/SoftwareUQTier 2
PC CAD2 L-Edit SW LinkCADLithography/SoftwareUQTier 2
PC CAD3 L-Edit VASE (Comsol- Simulaiton)Lithography/SoftwareUQTier 2
Planetary mixerLithographyUQTier 2
Silanisation dessicator – Long PocketLithographyUQTier 2
Soft lithography stationLithographyUQTier 2
Spin Coater (PDMS) – Long PocketLithographyUQTier 2
Tergeo plasma cleanerLithographyUQTier 2
UV Exposure-masking system (UV-KUB2)LithographyUQTier 2
ATR-FTIR SpectrometerMaterial CharacterisationUQTier 2
GPC-DMFMaterial CharacterisationUQTier 2
GPC-THFMaterial CharacterisationUQTier 2
GPC AqueousMaterial CharacterisationUQTier 2
LC-MS/MSMaterial CharacterisationUQTier 2
LitesizerMaterial CharacterisationUQTier 2
Mettler Toledo DSCMaterial CharacterisationUQTier 2
Mettler Toledo TGAMaterial CharacterisationUQTier 2
Plate ReaderMaterial CharacterisationUQTier 2
Glovebox #1SynthesisUQTier 2
Glovebox #2SynthesisUQTier 2
Fume CupboardEtchingGUTier 2
Wetbench, WeslanEtchingGUTier 2
Dicing Saw, Disco 2H/6TEtchingGUTier 2
Rapid Thermal Processing/Annealing System (RTP) Accuthermo AW610Materials synthesis and modificationGUTier 2
Surface Profiler, DEKTAK 150Imaging and Surface CharachterisationGUTier 2
Stress Measurement System, KLA-Tencor Flexus F2320Imaging and Surface CharachterisationGUTier 2
Reflectometer, FilmetricsImaging and Surface CharachterisationGUTier 2

Other costs that are not included in the hourly access rates are:

  • Consumable costs (charged at cost +10%)
  • Any legal fees incurred
  • GST where applicable

For more details, download the ANFF access and pricing policy or contact us directly at anff@uq.edu.au.