One step micro-moulding method for the integration of complex 3D structures in microfluidic devices

We’ve optimised Nanoscribe fabrication parameters for SU8 and developed a protocol to integrate these complex Nanoscribe-fabricated features into microfluidic devices in a single resist layer.

Arbitrary 3D structures fabricated by Nanoscribe on SU8 integrated with photolithography structures. Credit: Jane (Juan) Li & Doug Mair.

Jane (Juan) Li, a PhD student with the Cooper-White Group at the Australian Institute for Bioengineering and Nanotechnology, has been working with Professional Officer Doug Mair at ANFF-Q to develop this new—and faster—way to fabricate complex 3D structures in microfluidic devices.

The Nanoscribe system played a pivotal role in this project. The optimisation of operational parameters was performed by ANFF-Q staff, primarily Doug, as part of ANFF-Q’s ongoing process development. The characterisation and the protocol development was conducted and analysed by Jane. Jane was trained by ANFF-Q staff and given technical support throughout the process. All work was conducted with ANFF-Q facilities.

“The work described here provides the possibility of extending the potential structural diversity and fabrication accuracy of microfluidic devices, which is expected to facilitate the development of the next generation of microfluidic devices,” said Jane. “We will apply this method into specific applications, such as microfluidic devices with sensing and controlling functions, which will again require intensive interactions with ANFF.”